Title :
Automated statistical process matching across the virtual fab
Author :
Nirgude, Girish ; Nassar, Diaa
Author_Institution :
Intel Corp., Hillsboro
Abstract :
Statistical process matching plays a central role in detecting and minimizing special and common cause variations in semiconductor manufacturing. Performing automated statistical matching across many fabs, thousands of tools and millions of data points at acceptable performance and scalability requires a complex automation infrastructure. In this paper, we cover the main features of Intel´s fab automation infrastructure that facilitates a multitude of offline statistical analyses.
Keywords :
notch filters; operational amplifiers; power factor correction; power harmonic filters; transient response; voltage control; Intel fab automation infrastructure; automated statistical matching; automated statistical process matching; complex automation infrastructure; semiconductor manufacturing; statistical analyses; virtual fab; Data analysis; Data mining; Databases; Decision making; Engines; Logic; Manufacturing automation; Manufacturing processes; Process control; Semiconductor device manufacture;
Conference_Titel :
Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on
Conference_Location :
Santa Clara, CA
Print_ISBN :
978-1-4244-1142-9
Electronic_ISBN :
1523-553X
DOI :
10.1109/ISSM.2007.4446838
