• DocumentCode
    2944814
  • Title

    Application of robust design for the tuning of resistance-temperature characteristics in diodes

  • Author

    Kuramochi, N. ; Mochiduki, K. ; Tsuchitani, M.

  • Author_Institution
    TOSHIBA, Kawasaki
  • fYear
    2007
  • fDate
    15-17 Oct. 2007
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    It is of a great importance to fabricate products in multiple factories or lines with the identical characteristics. Fine tuning of the process parameters is required in factory to factory or line to line transplantation to ensure the identical performance of the product since the equivalence of the process parameters between different plants is not always maintained. This paper examines the novel approach using the standard SN ratio analysis to adjust process parameters for the new production line to obtain the same output as the referential one.
  • Keywords
    semiconductor device noise; semiconductor diodes; diode; resistance-temperature characteristic; signal noise ratio analysis; tuning method; Microelectronics; Noise level; Production facilities; Robustness; Semiconductor device noise; Semiconductor diodes; Signal analysis; Signal to noise ratio; Temperature; Tin;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on
  • Conference_Location
    Santa Clara, CA
  • ISSN
    1523-553X
  • Print_ISBN
    978-1-4244-1142-9
  • Electronic_ISBN
    1523-553X
  • Type

    conf

  • DOI
    10.1109/ISSM.2007.4446843
  • Filename
    4446843