Title :
Application of robust design for the tuning of resistance-temperature characteristics in diodes
Author :
Kuramochi, N. ; Mochiduki, K. ; Tsuchitani, M.
Author_Institution :
TOSHIBA, Kawasaki
Abstract :
It is of a great importance to fabricate products in multiple factories or lines with the identical characteristics. Fine tuning of the process parameters is required in factory to factory or line to line transplantation to ensure the identical performance of the product since the equivalence of the process parameters between different plants is not always maintained. This paper examines the novel approach using the standard SN ratio analysis to adjust process parameters for the new production line to obtain the same output as the referential one.
Keywords :
semiconductor device noise; semiconductor diodes; diode; resistance-temperature characteristic; signal noise ratio analysis; tuning method; Microelectronics; Noise level; Production facilities; Robustness; Semiconductor device noise; Semiconductor diodes; Signal analysis; Signal to noise ratio; Temperature; Tin;
Conference_Titel :
Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on
Conference_Location :
Santa Clara, CA
Print_ISBN :
978-1-4244-1142-9
Electronic_ISBN :
1523-553X
DOI :
10.1109/ISSM.2007.4446843