Title :
Optimization of semiconductor manufacturing equipment seals for enhanced performance
Author :
Foggiato, John ; Thrash, Aaron ; Freerks, Fred ; Al-Saleem, Furat
Author_Institution :
Green Tweed & Co., Santa Clara
Abstract :
A review of materials and optimization of seal designs is given with emphasis on the requirements for semiconductor manufacturing equipment. Various attributes are delineated as they pertain to aggressive temperature and chemical environments.
Keywords :
electronics industry; seals (stoppers); semiconductor device manufacture; seal design optimization; seal materials; semiconductor manufacturing equipment seals; Chemical vapor deposition; Cleaning; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma temperature; Sealing materials; Seals; Semiconductor device manufacture; Semiconductor materials;
Conference_Titel :
Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on
Conference_Location :
Santa Clara, CA
Print_ISBN :
978-1-4244-1142-9
Electronic_ISBN :
1523-553X
DOI :
10.1109/ISSM.2007.4446847
