DocumentCode
2944952
Title
Study of Residual charing in dielectric less capacitive MEMS switches
Author
Mardivirin, D. ; Bouyge, D. ; Crunteanu, A. ; Pothier, A. ; Blondy, P.
Author_Institution
XLIM, CNRs, Université de limoges, F-87060, FRANCE
fYear
2008
fDate
15-20 June 2008
Firstpage
33
Lastpage
36
Abstract
Dielectric charging is one of the most challenging issues in RF-MEMS capacitive switches. Dielectric less capacitive switch is shown with a measured on to off ratio of 9. The reliability of the switch has been studied and residual pull in voltage shift has been observed. For the first time, charging results are presented on this type of switch and validated up to one month. It is shwon that charging can be modeled using a simple Curie-Von Schweidler equation. This model has been validated, with good agreement between the coefficients determined after holding down the switch for about 10000 s, and further experimenal results up to one month in the down state.
Keywords
Dielectric measurements; Dielectrics; Mathematical model; Microswitches; RF-MEMS; capacitive switches; reliability;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 2008 IEEE MTT-S International
Conference_Location
Atlanta, GA, USA
ISSN
0149-645X
Print_ISBN
978-1-4244-1780-3
Electronic_ISBN
0149-645X
Type
conf
DOI
10.1109/MWSYM.2008.4633096
Filename
4633096
Link To Document