Systematic classification from the functional view in the check items for equipment quality assurance upon installation

In this paper, the methods and performed results are described regarding the technique for performing the equipment QA upon installation in high efficiency and high accuracy. By creating related tables and linking equipment QA item check lists and QA contents sheets, it is possible to examine the QA check items comprehensively. Then it is possible to clarify the purpose of check items and to prioritize execution of QA contents. The "QA item checklists for purchasing equipment" were created using this method for each type of wafer process equipment.