Design and Modeling of Magnetostrictive Thin Film Actuator

In this paper, EFGM is adopted in the coupled magneto-elastic field analysis of the system with magnetostrictive thin film to avoid the element distortion drawback of FEM analysis. Magnetostrictive thin film is prepared and experiments have been done to get the deflection data to compare with the calculation data. A prototype of magnetostrictive thin film actuator is designed and optimized to get a uniform magnetic field, which is very important for the film. Giant magnetostrictive thin film is characterized by magneto-mechanical strong coupling. That means the magnetic field and the mechanical field will affect each other.