Study of a cantilevered actuator driven by magnetostriction in low magnetic field

Author

Yokota, C. ; Yamazaki, A. ; Sendoh, M. ; Agatsuma, S. ; Ishiyama, K. ; Arai, K.

Author_Institution

Tohoku Univ., Sendai

fYear

2006

fDate

8-12 May 2006

Firstpage

678

Lastpage

678

Abstract

A cantilevered actuator is fabricated in this study by sputter deposition using amorphous Fe₇₂Si₁₄B₁₄ as the magnetostrictive material. The displacement of the cantilever is observed with applying the magnetic field of 10 kA/m to the width direction of the cantilever. Results show that the displacement of the cantilever increased with decreasing substrate thickness, and has a peak value at the thickness of the magnetic thin film of 0.5 mum when the substrate thickness is 7.5 mum.

Keywords

amorphous magnetic materials; boron alloys; electromagnetic actuators; ferromagnetic materials; iron alloys; magnetic thin films; magnetostriction; silicon alloys; sputter deposition; Fe₇₂Si₁₄B₁₄; amorphous magnetostrictive material; cantilevered actuator; magnetic thin film; magnetostriction; size 0.5 mum; size 7.5 mum; sputter deposition; substrate thickness; Actuators; Amorphous magnetic materials; Amorphous materials; Iron; Magnetic fields; Magnetic films; Magnetic materials; Magnetostriction; Sputtering; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 2006. INTERMAG 2006. IEEE International

Conference_Location

San Diego, CA

Print_ISBN

1-4244-1479-2

Type

conf

DOI

10.1109/INTMAG.2006.376402

Filename

4262111