Title :
Slit design consideration on the ferromagnetic RF integrated inductor
Author :
Yamada, K. ; Kim, K. ; Yamaguchi, M.
Author_Institution :
Tohoku Univ., Sendai
Abstract :
This paper investigates five types of RF integrated spiral inductors microfabricated and measured. The quality factor of Q=20.7 has been achieved for the first time for the Shifted type ferromagnetic RF integrated inductor. Slit location also influences the LC resonance frequency.
Keywords :
Q-factor; inductors; magnetic circuits; radiofrequency integrated circuits; LC resonance frequency; ferromagnetic RF integrated inductor; quality factor; slit location; Coils; Inductance; Inductors; Magnetic anisotropy; Magnetic films; Magnetic flux; Magnetic resonance; Perpendicular magnetic anisotropy; Q factor; Radio frequency;
Conference_Titel :
Magnetics Conference, 2006. INTERMAG 2006. IEEE International
Conference_Location :
San Diego, CA
Print_ISBN :
1-4244-1479-2
DOI :
10.1109/INTMAG.2006.376405
