Title :
Low loss switchable coupled resonator bandpass filter
Author :
Ong, Cen Yen ; Okoniewski, Michal
Author_Institution :
Department of Electrical and Computer Engineering, University of Calgary, Alberta, Canada T2N 1N4
Abstract :
A compact four-resonator microwave bandpass filter is presented. The filter frequency response is switched using electrostatically actuated MEMS cantilever capacitive switches. The filter is fabricated in a custom fabrication process with high resistivity chrome silicide bias lines. Measured frequency response of the filter switches from 16.025 to 13.675 GHz with insertion losses of 0.6 and 1.3 dB respectively. To the best of our knowledge, the filter exhibits the lowest insertion losses among MEMS-tunable microwave filters reported to date.
Keywords :
band-pass filters; coupled circuits; frequency response; micromechanical devices; microstrip filters; microwave filters; resonator filters; switched capacitor filters; electrostatic actuated MEMS cantilever capacitive switches; four-resonator microwave bandpass filter; frequency response; high resistivity chrome silicide bias lines; insertion loss; low loss switchable coupled filter fabrication; Band pass filters; Conductivity; Fabrication; Frequency response; Insertion loss; Micromechanical devices; Microwave filters; Resonator filters; Silicides; Switches; Microelectromechanical devices; bandpass filters; coupling circuits; micromachining; microstrip resonators;
Conference_Titel :
Microwave Symposium Digest, 2008 IEEE MTT-S International
Conference_Location :
Atlanta, GA
Print_ISBN :
978-1-4244-1780-3
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2008.4633122
