Title :
A highly fast capacitive-type humidity sensor using percolating carbon nanotube films as a porous electrode material
Author :
Hyun Pyo Hong ; Kyung Hoon Jung ; Nam Ki Min ; Yong Hoon Rhee ; Chan Won Park
Author_Institution :
Dept. of Control & Instrum. Eng., Korea Univ., Sejong, South Korea
Abstract :
Open porous multi-walled carbon nanotube (MWCNT) film networks were used as an upper electrode of polyimide (PI)-based capacitive humidity sensor for highly fast response time. MWCNT films were deposited by spray-dry method and patterned by O2 plasma. PI capacitive humidity sensors with MWCNT film electrodes showed a very short response time of less than 3 s and a good linearity of 0.9995 compared to the humidity sensors with porous Cr electrodes. The large improvement in response time was explained on the base of a percolated pore network that is more accessible for water molecules.
Keywords :
capacitive sensors; carbon nanotubes; chemical sensors; humidity sensors; nanoporous materials; polymer films; PI-based capacitive humidity sensor; highly fast capacitive-type humidity sensor; percolated pore network; percolating carbon nanotube films; polyimide-based capacitive humidity sensor; porous MWCNT film networks; porous electrode material; porous multiwalled carbon nanotube film networks; spray-dry method; water molecules; Electrodes; Films; Humidity; Metals; Sensitivity; Sensors; Time factors; MWCNT film; electrode; humidity sensor; polyimide;
Conference_Titel :
Sensors, 2012 IEEE
Conference_Location :
Taipei
Print_ISBN :
978-1-4577-1766-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2012.6411151
