A highly fast capacitive-type humidity sensor using percolating carbon nanotube films as a porous electrode material

Author

Hyun Pyo Hong ; Kyung Hoon Jung ; Nam Ki Min ; Yong Hoon Rhee ; Chan Won Park

Author_Institution

Dept. of Control & Instrum. Eng., Korea Univ., Sejong, South Korea

fYear

2012

fDate

28-31 Oct. 2012

Firstpage

1

Lastpage

4

Abstract

Open porous multi-walled carbon nanotube (MWCNT) film networks were used as an upper electrode of polyimide (PI)-based capacitive humidity sensor for highly fast response time. MWCNT films were deposited by spray-dry method and patterned by O₂ plasma. PI capacitive humidity sensors with MWCNT film electrodes showed a very short response time of less than 3 s and a good linearity of 0.9995 compared to the humidity sensors with porous Cr electrodes. The large improvement in response time was explained on the base of a percolated pore network that is more accessible for water molecules.

Keywords

capacitive sensors; carbon nanotubes; chemical sensors; humidity sensors; nanoporous materials; polymer films; PI-based capacitive humidity sensor; highly fast capacitive-type humidity sensor; percolated pore network; percolating carbon nanotube films; polyimide-based capacitive humidity sensor; porous MWCNT film networks; porous electrode material; porous multiwalled carbon nanotube film networks; spray-dry method; water molecules; Electrodes; Films; Humidity; Metals; Sensitivity; Sensors; Time factors; MWCNT film; electrode; humidity sensor; polyimide;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2012 IEEE

Conference_Location

Taipei

ISSN

1930-0395

Print_ISBN

978-1-4577-1766-6

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2012.6411151

Filename

6411151