• DocumentCode
    2946659
  • Title

    Design, fabrication and properties of infrared, 3-D, silicon photonic lattices

  • Author

    Fleming, J.G. ; Shawn-Yu Lin

  • Author_Institution
    Sandia Nat. Labs., Albuquerque, NM, USA
  • fYear
    2000
  • fDate
    10-15 Sept. 2000
  • Abstract
    Summary form only. 3-D photonic lattices were first proposed and demonstrated in the mid-to-late 1980s. However, due to fabrication difficulties, lattices active in the infrared are only just emerging. A variety of structures and fabrication approaches have been investigated. The most promising approach for many potential applications is a diamondlike structure fabricated using silicon microprocessing techniques. This technique has recently enabled us to fabricate 3-D silicon photonic lattices active in the infrared with bandgaps centered from 12 down to 1.55 /spl mu/m. The ability to fabricate these structures has prompted us to experimentally investigate different designs which have elements of diamond symmetry as well as other symmetries such as simple cubic, inverse face centered cubic, inverse hexagonal close packed, and wurtzite. It is noted that using silicon fabrication processes it is possible to simultaneously fabricate a wide range of different structures during a single process run.
  • Keywords
    elemental semiconductors; micro-optics; optical fabrication; photolithography; photonic band gap; silicon; 1.55 micron; IR 3D silicon photonic lattices; Si; cavities; design; diamondlike structure; fabrication; inverse face centered cubic symmetry; inverse hexagonal close packed symmetry; silicon microprocessing; simple cubic symmetry; waveguides; wurtzite symmetry; Electromagnetic devices; FCC; Fabrication; Laboratories; Lattices; Magnetic fields; Magnetic materials; Photonic band gap; Silicon; USA Councils;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Europe, 2000. Conference Digest. 2000 Conference on
  • Conference_Location
    Nice
  • Print_ISBN
    0-7803-6319-1
  • Type

    conf

  • DOI
    10.1109/CLEOE.2000.909748
  • Filename
    909748