DocumentCode
2946659
Title
Design, fabrication and properties of infrared, 3-D, silicon photonic lattices
Author
Fleming, J.G. ; Shawn-Yu Lin
Author_Institution
Sandia Nat. Labs., Albuquerque, NM, USA
fYear
2000
fDate
10-15 Sept. 2000
Abstract
Summary form only. 3-D photonic lattices were first proposed and demonstrated in the mid-to-late 1980s. However, due to fabrication difficulties, lattices active in the infrared are only just emerging. A variety of structures and fabrication approaches have been investigated. The most promising approach for many potential applications is a diamondlike structure fabricated using silicon microprocessing techniques. This technique has recently enabled us to fabricate 3-D silicon photonic lattices active in the infrared with bandgaps centered from 12 down to 1.55 /spl mu/m. The ability to fabricate these structures has prompted us to experimentally investigate different designs which have elements of diamond symmetry as well as other symmetries such as simple cubic, inverse face centered cubic, inverse hexagonal close packed, and wurtzite. It is noted that using silicon fabrication processes it is possible to simultaneously fabricate a wide range of different structures during a single process run.
Keywords
elemental semiconductors; micro-optics; optical fabrication; photolithography; photonic band gap; silicon; 1.55 micron; IR 3D silicon photonic lattices; Si; cavities; design; diamondlike structure; fabrication; inverse face centered cubic symmetry; inverse hexagonal close packed symmetry; silicon microprocessing; simple cubic symmetry; waveguides; wurtzite symmetry; Electromagnetic devices; FCC; Fabrication; Laboratories; Lattices; Magnetic fields; Magnetic materials; Photonic band gap; Silicon; USA Councils;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe, 2000. Conference Digest. 2000 Conference on
Conference_Location
Nice
Print_ISBN
0-7803-6319-1
Type
conf
DOI
10.1109/CLEOE.2000.909748
Filename
909748
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