A capacitive relative humidity sensor using polymer nanoparticles

This paper presents a relative humidity sensor that employs polyimide nanoparticles as the sensing medium. Nanoparticles are deposited through electrospraying process and exhibit higher linearity compared to a uniform film of polyimide that is deposited through a spin-on process. Another advantage of this sensor compared to the existing humidity sensors is its simple structure, which can decrease the fabrication costs. Experimental results were obtained to show different linearity of the humidity sensor under different parameters. Various sensor design parameters were studied in order to design a sensor with the best overall performance.