DocumentCode :
2946960
Title :
Magnetometry methods for thin film edge property measurements
Author :
Maranville, B.B. ; McMichael, R.D. ; Ross, C.A. ; Cheng, J.Y. ; Dennis, C.L.
Author_Institution :
NIST, Gaithersburg
fYear :
2006
fDate :
8-12 May 2006
Firstpage :
757
Lastpage :
757
Abstract :
We describe two techniques in this paper that use vector magnetometry to determine the straightness and the edge characteristics of arrays of long, straight, thin-film stripes. A variety of measurement techniques are available for characterizing bulk materials, thin films and even thin film interfaces, but few techniques are available for characterization of thin film edges. The magnetic properties of edges are important because they can determine the behavior of thin film devices. In very small patterned elements, the entire film is coupled to the edge by exchange and magnetostatic effects, and in larger elements, reversal often nucleates at the edge.
Keywords :
magnetometers; magnetostatics; thin films; edge straightness; magnetostatic effects; thin film edge property measurements; thin-film stripes; vector magnetometry; Magnetic field measurement; Magnetic properties; Magnetic switching; Magnetostatics; Materials science and technology; Micromagnetics; Plasma measurements; Saturation magnetization; Transistors; Vibration measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Magnetics Conference, 2006. INTERMAG 2006. IEEE International
Conference_Location :
San Diego, CA
Print_ISBN :
1-4244-1479-2
Type :
conf
DOI :
10.1109/INTMAG.2006.376481
Filename :
4262190
Link To Document :
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