Title :
Microlens-integrated vertical-cavity surface-emitting lasers for large-tolerant fiber optic coupling
Author :
Song, Young Min ; Chang, Ki Soo ; Lee, Yong Tak
Author_Institution :
Gwangju Inst. of Sci. & Technol., Gwangju
Abstract :
We have fabricated microlens-integrated vertical-cavity surface-emitting lasers (VCSELs) by selective oxidation of composition-graded digital alloy AlGaAs. Microlens-integrated VCSELs with self-aligned structure was fabricated using standard VCSEL processing without additional process steps, due to the simultaneous formation of a microlens and oxide aperture. The output beam from the oxide-buried and oxide-removed AlGaAs microlens-integrated VCSELs has a beam radius of 3.7 mum and 3.5 mum at a distance of about 25 mum and 15 mum, respectively, from the surface of the VCSEL. From the calculation of VCSEL-to-SM fiber coupling efficiency, the oxide-buried lensed-VCSELs exhibited 1-dB axial alignment tolerance range of about 40 mum.
Keywords :
III-V semiconductors; aluminium compounds; gallium arsenide; integrated optics; integrated optoelectronics; laser cavity resonators; microlenses; optical fibre couplers; surface emitting lasers; AlGaAs; VCSEL; alignment tolerance; beam radius; composition-graded digital alloy; fiber coupling efficiency; microlens-integrated vertical-cavity surface-emitting lasers; oxide aperture; selective oxidation; self-aligned structure; Digital alloys; Fiber lasers; Laser beams; Lenses; Microoptics; Optical coupling; Optical fibers; Oxidation; Surface emitting lasers; Vertical cavity surface emitting lasers; VCSEL; coupling efficiency; digital alloy; microlens; selective oxidation;
Conference_Titel :
ICTON Mediterranean Winter Conference, 2007. ICTON-MW 2007
Conference_Location :
Sousse
Print_ISBN :
978-1-4244-1639-4
Electronic_ISBN :
978-1-4244-1639-4
DOI :
10.1109/ICTONMW.2007.4446980
