Title :
Lattice modulation of auto-cloned photonic crystals
Author :
Kawakami, Shojiro ; Ohtera, Yasuo ; Kawashima, T. ; Sato, Takao
Author_Institution :
New Ind. Creation Hatchery Center, Tohoku Univ., Sendai, Japan
Abstract :
Summary form only given. We have thus far developed a new fabrication process of photonic crystals of an arbitrary dimensions (autocloning). It is based on the automatic evolution of the periodic structure resulting from pattern dynamics of sputter deposition and sputter etching. It has a number of advantages summarized in the following: applicable to 1D, 2D, 3D; excellent reproducibility; and is usable in a wide variety of material systems.
Keywords :
optical fabrication; photonic band gap; sputter deposition; arbitrary dimensions; auto-cloned photonic crystals; autocloning; automatic evolution; fabrication process; lattice modulation; material systems; pattern dynamics; periodic structure; reproducibility; sputter deposition; sputter etching; Lattices; Optical modulation; Photonic crystals;
Conference_Titel :
Lasers and Electro-Optics Europe, 2000. Conference Digest. 2000 Conference on
Conference_Location :
Nice
Print_ISBN :
0-7803-6319-1
DOI :
10.1109/CLEOE.2000.909784
