Comparison Study of Repeatability of Harmonic In-Situ Fly-Height Measurement Methods

This paper compares the repeatability of harmonic in-situ fly height methods, including the triple harmonic method and the square wave recording method. And the possible reasons for the fly-height variation in the testing are explored. Results of triple harmonic method and square wave recording method are plotted. They show similar trend as the experiment. It confirms that the repeatability is caused by voltage testing resolution.