Title :
Digital Holography Used for Shape Measurement of Microscopic Object
Author :
Liu, Jingbo ; Song, Xiufa ; Huang, Min ; Wang, Huaying
Author_Institution :
Hebei Univ. of Eng., Handan, China
Abstract :
Digital holography is an emergent imaging technique which provides complete three-dimensional information of an object. An off-axis Fresnel digital holographic system with pre-magnification is built. The recording and numerical reconstruction of digital hologram is analyzed. Experimental investigations have been performed for a USAF test target. The focal plane is determined automatically by Fourier spectrum algorithm. The accurate phase image is obtained based on the automatic phase aberration compensation procedure. The lateral resolution with better than 1 and the axial resolution of no larger than 10 nm have been achieved experimentally. The results show that digital holography is very suited for imaging and measurement of microscopic object.
Keywords :
Fourier transform optics; aberrations; focal planes; holography; image reconstruction; optical images; optical information processing; shape measurement; 3D information; Fourier spectrum algorithm; USAF test target; automatic phase aberration compensation; axial resolution; digital hologram recording; digital holography; focal plane; lateral resolution; microscopic object shape measurement; numerical reconstruction; off-axis Fresnel digital holographic system; phase image; premagnification; Biomedical optical imaging; Charge coupled devices; Digital recording; Holographic optical components; Holography; Image reconstruction; Laser beams; Microscopy; Sensor arrays; Shape measurement; digital holography; microscopic imaging; phase aberration compensation;
Conference_Titel :
Measuring Technology and Mechatronics Automation, 2009. ICMTMA '09. International Conference on
Conference_Location :
Zhangjiajie, Hunan
Print_ISBN :
978-0-7695-3583-8
DOI :
10.1109/ICMTMA.2009.665
