Metal Bulk Foil Resistor Characterization for BAW Application at Low Cryogenic Temperatures

Author

Bara-Maillet, Romain ; Goryachev, M. ; Creedon, D.L. ; Le Floch, J.-M. ; Tobar, M.E.

Author_Institution

Univ. of Western Australia, Crawley, WA, Australia

Volume

63

Issue

3

fYear

2014

fDate

Mar-14

Firstpage

628

Lastpage

632

Abstract

We report on the development of a characterization system and calibration procedure for a bulk acoustic wave (BAW) resonator using a bulk metal foil resistor operated at temperatures as low as tens of millikelvin. The 50-Ω resistor demonstrated extremely good stability and small drift at a temperature of 50 mK, with the resistance varying by 1.5% between room temperature and 50 mK. The BAW quartz resonator exhibited a quality factor of 8×10⁵ at 206 MHz, which is one order of magnitude higher than state-of-the-art equivalent devices at ambient temperature. Such results were obtained due to the combination of a suitable technology of resistor, and the custom design of an electronic circuit board for calibration.

Keywords

acoustic resonators; bulk acoustic wave devices; calibration; crystal resonators; thin film resistors; BAW quartz resonator; bulk acoustic wave resonator; calibration procedure; electronic circuit board; low cryogenic temperature; metal bulk foil resistor characterization; resistance 50 ohm; stability; temperature 50 mK; Australia; Electrical resistance measurement; Metals; Resistance; Resistors; Standards; Temperature measurement; BAW; calibration; cryogenic; resistance; stability;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/TIM.2013.2281561

Filename

6613515