Control of an 2-DOF electromagnetic actuator for high precision and high-throughput pick-and-place tasks

Author

Si-Lu Chen ; Tat Joo Teo ; Guilin Yang

Author_Institution

Mechatron. Group, Agency for Sci., Technol. & Res. (A*STAR), Singapore, Singapore

fYear

2013

fDate

9-12 July 2013

Firstpage

146

Lastpage

151

Abstract

A linear-rotary (LR) direct-drive actuator is designed for IC chips Pick-and-place (PnP) application. The entire PnP process is designed with sequential motion of z and θ axes, where the accuracy is ensured by triggering of In-Position Signal. The decentralized PIV controllers with feedforward terms are carefully tuned to achieve the minimization of the settling time as well as maintenance of short raise time. After fine tuning of controller, the single LR actuator can pick and place up to 8000 IC chips per hour.

Keywords

decentralised control; design engineering; drives; electromagnetic actuators; feedforward; integrated circuit manufacture; precision engineering; surface mount technology; 2-DOF electromagnetic actuator; IC chip pick-and-place application; LR actuator; PnP process; controller tuning; decentralized PIV controller; degrees-of-freedom; feedforward; high-throughput pick-and-place task; in-position signal; linear-rotary direct-drive actuator; sequential motion; Actuators; Coils; Force; Indium phosphide; Integrated circuits; Torque; Tracking;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Intelligent Mechatronics (AIM), 2013 IEEE/ASME International Conference on

Conference_Location

Wollongong, NSW

ISSN

2159-6247

Print_ISBN

978-1-4673-5319-9

Type

conf

DOI

10.1109/AIM.2013.6584083

Filename

6584083