DocumentCode
2948285
Title
Two-chip MEMS capacitive microphone with CMOS analog amplifier
Author
Shin Hur ; Youngdo Jung ; Young Hwa Lee ; Jun-Hyuk Kwak
Author_Institution
Korea Inst. of Machinery & Mater., Daejeon, South Korea
fYear
2012
fDate
28-31 Oct. 2012
Firstpage
1
Lastpage
4
Abstract
In this paper, we performed to develop two-chip MEMS capacitive microphone with CMOS analog amplifier. At first, we carried out multi-physics simulation to optimize the cutoff frequency and sensitivity of the designed MEMS microphone. Then MEMS microphone and CMOS analog preamplifier was fabricated and integrated. The acoustic sensitivity of developed MEMS microphone was measured with -41.3 dB.
Keywords
CMOS analogue integrated circuits; micromechanical devices; microphones; preamplifiers; CMOS analog preamplifier; acoustic sensitivity; multiphysics simulation; two-chip MEMS capacitive microphone; Acoustic measurements; CMOS integrated circuits; Micromechanical devices; Microphones; Preamplifiers; Sensitivity; Voltage measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2012 IEEE
Conference_Location
Taipei
ISSN
1930-0395
Print_ISBN
978-1-4577-1766-6
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2012.6411287
Filename
6411287
Link To Document