Title :
Two-chip MEMS capacitive microphone with CMOS analog amplifier
Author :
Shin Hur ; Youngdo Jung ; Young Hwa Lee ; Jun-Hyuk Kwak
Author_Institution :
Korea Inst. of Machinery & Mater., Daejeon, South Korea
Abstract :
In this paper, we performed to develop two-chip MEMS capacitive microphone with CMOS analog amplifier. At first, we carried out multi-physics simulation to optimize the cutoff frequency and sensitivity of the designed MEMS microphone. Then MEMS microphone and CMOS analog preamplifier was fabricated and integrated. The acoustic sensitivity of developed MEMS microphone was measured with -41.3 dB.
Keywords :
CMOS analogue integrated circuits; micromechanical devices; microphones; preamplifiers; CMOS analog preamplifier; acoustic sensitivity; multiphysics simulation; two-chip MEMS capacitive microphone; Acoustic measurements; CMOS integrated circuits; Micromechanical devices; Microphones; Preamplifiers; Sensitivity; Voltage measurement;
Conference_Titel :
Sensors, 2012 IEEE
Conference_Location :
Taipei
Print_ISBN :
978-1-4577-1766-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2012.6411287
