Title :
The Structure and Magnetic Properties of CoNbZr-Sm2O3 Granular Films
Author :
Jung, W. ; Lee, C. ; Koo, B. ; Shin, K. ; Yoo, J. ; Shimada, Y.
Author_Institution :
Changwon Univ., Changwon
Abstract :
In this study, granular films were prepared by reactive RF magnetron sputtering. The film was deposited on Si (100) substrates. The magnetic properties (coercivity) were measured by a vibrating sample magnetometer (VSM). The electrical resistivity (p) of the thin film was determined by means of a four-point probe method. The film structures were investigated by X-ray diffractometry (XRD) and transmission electron microscopy (TEM).
Keywords :
X-ray diffraction; cobalt alloys; coercive force; electrical resistivity; granular materials; granular structure; magnetic thin films; magnetometers; niobium alloys; samarium compounds; sputter deposition; transmission electron microscopy; zirconium alloys; CoNbZr-Sm2O3; Si; Si (100) substrates; TEM; X-ray diffractometry; XRD; electrical resistivity; four-point probe method; granular thin film structure; magnetic properties; reactive RF magnetron sputtering; transmission electron microscopy; vibrating sample magnetometer; Coercive force; Electric resistance; Magnetic films; Magnetic properties; Magnetometers; Radio frequency; Semiconductor films; Sputtering; Substrates; Vibration measurement;
Conference_Titel :
Magnetics Conference, 2006. INTERMAG 2006. IEEE International
Conference_Location :
San Diego, CA
Print_ISBN :
1-4244-1479-2
DOI :
10.1109/INTMAG.2006.374870
