Title :
A novel magnetic-catalytic CMOS MEMS compatible gas sensor with ultra low power consumption
Author :
Chih-Jen Cheng ; Chih-Hsiung Shen ; Shu-Jung Chen
Author_Institution :
Dept. of Mechatron. Eng., Nat. Changhua Univ. of Educ., Changhua, Taiwan
Abstract :
Beyond the conventional chemical sensors with heating power, we proposed a total new magnetic-catalytic sensing mechanism without heating which includes the original sensing material and also magnetic-catalytic with even higher sensitivity than before. A magnetic material in sol-gel method and a prepared solution of sol-gel SnO2 is mixed at SnO2 : Fe3O4 = 3 : 1. The samples with several pH conditions were under test and verified inside a CO gas chamber with solenoidal coils. The sensitivity of proposed monoxide sensor reaches 0.3416%/ppm under 18.2 Gauss without heating which shows applicable for an ultra low power CO sensor with high sensitivity.
Keywords :
CMOS integrated circuits; carbon compounds; catalysts; chemical sensors; gas sensors; iron compounds; magnetic materials; microsensors; semiconductor materials; sol-gel processing; solenoids; tin compounds; CO; SnO2-Fe3O4; chemical sensor; gas chamber; gas sensor; magnetic catalytic CMOS MEMS sensor; magnetic material; monoxide sensor; sensing material; sol-gel method; solenoidal coil; Electrodes; Etching; Gas detectors; Materials; Metals; Sensitivity; CMOS; Fe3O4; Gas sensor; MEMS; Magnetic-Catalyst; SnO2;
Conference_Titel :
Sensors, 2012 IEEE
Conference_Location :
Taipei
Print_ISBN :
978-1-4577-1766-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2012.6411302
