A MEMS electromagnetic energy harvester using ultrasonic excitation

Author

Fowler, Anthony George ; Moheimani, S.O.R. ; Behrens, Sam

Author_Institution

Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Newcastle, NSW, Australia

fYear

2013

fDate

9-12 July 2013

Firstpage

330

Lastpage

334

Abstract

Energy harvesting remains a significant area of interest in current microelectromechanical systems (MEMS) research, with integrated microscale harvesters potentially being able to increase the running time of a range of electronic systems. This paper presents the design and characterization of an electromagnetic MEMS energy harvester that uses ultrasonic waves for mechanical excitation. A potential application for this concept is the charging of implanted biomedical devices via such micro-sized harvesters. The fabricated device is experimentally tested and characterized, with 0.06nW of electrical power being generated at the device´s first resonance frequency of 41.3 kHz.

Keywords

energy harvesting; micromechanical devices; MEMS electromagnetic energy harvester; energy harvesting; frequency 41.3 kHz; integrated microscale harvesters; mechanical excitation; power 0.06 nW; resonance frequency; ultrasonic excitation; ultrasonic waves; Acoustics; Coils; Electromagnetics; Nickel; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Intelligent Mechatronics (AIM), 2013 IEEE/ASME International Conference on

Conference_Location

Wollongong, NSW

ISSN

2159-6247

Print_ISBN

978-1-4673-5319-9

Type

conf

DOI

10.1109/AIM.2013.6584113

Filename

6584113