Monte-Carlo analysis of measurement uncertainties for on-wafer thru-reflect-line calibrations

Author

Leinhos, J. ; Arz, U.

Author_Institution

Physikalisch-Technische Bundesanstalt, Bundesallee 100, 38116 Braunschweig Germany

fYear

2008

fDate

15-20 June 2008

Firstpage

33

Lastpage

36

Abstract

Although on-wafer high-frequency measurements are nowadays commonly used, uncertainties for scattering - parameter measurements in planar transmission lines are still not yet established - a problem which has been long solved in coaxial lines and waveguides. We describe a GUM-compliant approach that is capable of providing a traceability path for on-wafer measurements up to 50 GHz using the TRL calibration algorithm.

Keywords

Monte Carlo methods; coaxial cables; transmission line theory; GUM-compliant approach; Monte-Carlo analysis; coaxial lines; frequency 50 GHz; measurement uncertainties; on-wafer high-frequency measurements; on-wafer thru-reflect-line calibrations; planar transmission lines; traceability path; Calibration; Coaxial components; Conductivity; Dielectric materials; Dielectric measurements; Dielectric substrates; Frequency; Measurement standards; Measurement uncertainty; Transmission line measurements;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 2008 IEEE MTT-S International

Conference_Location

Atlanta, GA

ISSN

0149-645X

Print_ISBN

978-1-4244-1780-3

Electronic_ISBN

0149-645X

Type

conf

DOI

10.1109/MWSYM.2008.4633323

Filename

4633323