Title :
A compact sensor for interferometric displacement measurements
Author :
Maier, Thomas ; Gornik, E.
Author_Institution :
Inst. fur Festkorperelektronik, Tech. Univ. Wien, Austria
Abstract :
Summary form only given. Interferometers based on the self-mixing effect in a single-mode laser diode are a low-cost solution for precise measurements of displacements, vibrations or absolute distances. Due to their inherent single-mode behaviour and their homogenous far field patterns, vertical-cavity surface emitting lasers (VCSELs) appear especially suitable for this kind of application. Furthermore, by monolithic integration of a high-efficiency resonance-enhanced photodetector (REPD) which is used to read out the interferometric signal, a simple and compact interferometric sensor can be realized.
Keywords :
displacement measurement; integrated optics; light interferometers; measurement by laser beam; optical sensors; photodetectors; semiconductor lasers; surface emitting lasers; compact sensor; far-field pattern; interferometric displacement measurement; monolithic integration; resonance enhanced photodetector; self-mixing effect; single mode laser; vertical cavity surface emitting laser; Detectors; Displacement measurement; Interferometers; Laser feedback; Laser modes; Optical feedback; Power generation; Vertical cavity surface emitting lasers; Vibration measurement; Voltage;
Conference_Titel :
Lasers and Electro-Optics Europe, 2000. Conference Digest. 2000 Conference on
Conference_Location :
Nice
Print_ISBN :
0-7803-6319-1
DOI :
10.1109/CLEOE.2000.909946
