DocumentCode
2950909
Title
Flux screening technique for growth of high quality ferrite films by pulsed laser deposition
Author
Chen, Y. ; Lu, T. ; Zhang, X. ; Vittoria, C. ; Harris, V.G.
Author_Institution
Northeastern Univ., Boston
fYear
2006
fDate
8-12 May 2006
Firstpage
1002
Lastpage
1002
Abstract
High quality ferrite films were grown by pulsed laser deposition (PLD). In this approach a stainless steel screen is placed between the MnZn-ferrite target and the substrate in a PLD system. MnZn ferrite films were deposited on (400) Si substrate by ablating a Mn0.48Zn0.46Fe2.06O4 target using a KrF excimer laser operated at 5 Hz and 1.5~2 J/cm2. We measured the structural, magnetic and microwave properties of the films. FMR linewidth and surface morphology of the ferrite films produced by normal PLD and flux screened PLD process are measured.
Keywords
excimer lasers; ferrites; magnetic thin films; manganese compounds; microwave materials; pulsed laser deposition; surface morphology; zinc compounds; FMR linewidth measurement; KrF excimer laser; MnZnFe2O3-FeCrCJk-Si; Si; ferrite film growth; flux screening technique; frequency 5 Hz; magnetic properties; microwave properties; pulsed laser deposition; structural properties; surface morphology; Ferrite films; Iron; Magnetic flux; Magnetic properties; Masers; Microwave measurements; Optical pulses; Pulsed laser deposition; Steel; Zinc;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 2006. INTERMAG 2006. IEEE International
Conference_Location
San Diego, CA
Print_ISBN
1-4244-1479-2
Type
conf
DOI
10.1109/INTMAG.2006.375468
Filename
4262435
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