• DocumentCode
    2950909
  • Title

    Flux screening technique for growth of high quality ferrite films by pulsed laser deposition

  • Author

    Chen, Y. ; Lu, T. ; Zhang, X. ; Vittoria, C. ; Harris, V.G.

  • Author_Institution
    Northeastern Univ., Boston
  • fYear
    2006
  • fDate
    8-12 May 2006
  • Firstpage
    1002
  • Lastpage
    1002
  • Abstract
    High quality ferrite films were grown by pulsed laser deposition (PLD). In this approach a stainless steel screen is placed between the MnZn-ferrite target and the substrate in a PLD system. MnZn ferrite films were deposited on (400) Si substrate by ablating a Mn0.48Zn0.46Fe2.06O4 target using a KrF excimer laser operated at 5 Hz and 1.5~2 J/cm2. We measured the structural, magnetic and microwave properties of the films. FMR linewidth and surface morphology of the ferrite films produced by normal PLD and flux screened PLD process are measured.
  • Keywords
    excimer lasers; ferrites; magnetic thin films; manganese compounds; microwave materials; pulsed laser deposition; surface morphology; zinc compounds; FMR linewidth measurement; KrF excimer laser; MnZnFe2O3-FeCrCJk-Si; Si; ferrite film growth; flux screening technique; frequency 5 Hz; magnetic properties; microwave properties; pulsed laser deposition; structural properties; surface morphology; Ferrite films; Iron; Magnetic flux; Magnetic properties; Masers; Microwave measurements; Optical pulses; Pulsed laser deposition; Steel; Zinc;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Magnetics Conference, 2006. INTERMAG 2006. IEEE International
  • Conference_Location
    San Diego, CA
  • Print_ISBN
    1-4244-1479-2
  • Type

    conf

  • DOI
    10.1109/INTMAG.2006.375468
  • Filename
    4262435