• DocumentCode
    2951247
  • Title

    Behavior of aluminum nitride ceramic surfaces under hydrothermal oxidation treatments

  • Author

    Suryanarayana, D. ; Matienzo, L.J. ; Spencer, D.F.

  • Author_Institution
    IBM Corp., Endicott, NY, USA
  • fYear
    1989
  • fDate
    22-24 May 1989
  • Firstpage
    29
  • Lastpage
    32
  • Abstract
    AlN ceramics were prepared by pressureless sintering of the nitride powders with mixtures containing yttria, magnesia and silicon nitride at 1900°C. To investigate the sensitivity of these ceramics to hydrothermal treatments, samples were treated in oxygen-containing atmospheres for different exposure times and temperatures. During the exposure, a thin layer of oxide develops and coats the ceramic surface. A variety of physical and chemical methods of analysis were used to characterize the resulting materials. Surface roughness, morphology, and weight changes during exposure were followed. The ceramic phases as formed during the sintering step and additional treatments have been characterized using X-ray photoelectron spectroscopy (XPS), and the photoelectron binding energies for the pure and reacted phases are reported. The XPS technique was also used to follow the surface evolution of the solid/gas interface produced by the surface treatments
  • Keywords
    X-ray photoelectron spectra; aluminium compounds; ceramics; materials testing; oxidation; sintering; substrates; 1900 degC; AlN ceramic surfaces; X-ray photoelectron spectroscopy; XPS; Y2O3-MgO-SiN mixtures; ceramic phases; chemical methods; exposure temperatures; exposure times; hydrothermal oxidation treatments; morphology; oxygen-containing atmospheres; photoelectron binding energies; physical methods; pressureless sintering; pure phases; reacted phases; solid/gas interface; surface evolution; surface roughness; surface treatments; thin oxide/layer; weight changes; Aluminum nitride; Ceramics; Chemical analysis; Magnesium compounds; Powders; Rough surfaces; Silicon; Surface morphology; Surface roughness; Surface treatment;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Components Conference, 1989. Proceedings., 39th
  • Conference_Location
    Houston, TX
  • Type

    conf

  • DOI
    10.1109/ECC.1989.77724
  • Filename
    77724