Title :
Microstructuring of periodic patterns with femtosecond laser pulses
Author :
Korte, F. ; Bauer, T. ; Nolte, S. ; Egbert, A. ; Fallnich, C. ; Welling, H.
Author_Institution :
Laser Zentrum Hannover eV, Germany
Abstract :
Summary form only given. It has been demonstrated within the past few years that femtosecond lasers are superior tools for microstructuring of nearly all kinds of solid materials. The treated materials suffer no considerable thermal or mechanical damage. This gives access to a variety of new and innovative fields of applications. Periodic structures with reproducible basic patterns, which have a lateral dimension of approximately 10 /spl mu/m, are produced e.g. in nickel and polycarbonate films using a Ti:sapphire laser and a high-precision positioning system.
Keywords :
laser beam machining; measurement errors; micromachining; micropositioning; periodic structures; sapphire; titanium; 10 mum; 130 fs; Ni; Ni films; Ti:sapphire laser; femtosecond laser pulses; high-precision positioning system; lateral dimension; mechanical damage; microstructuring; periodic patterns; periodic structures; polycarbonate films; reproducible basic patterns; solid materials; thermal damage; Acceleration; Biological materials; Gas lasers; Laser beam cutting; Laser beams; Optical materials; Optical pulses; Plasmas; Production; Solid lasers;
Conference_Titel :
Lasers and Electro-Optics Europe, 2000. Conference Digest. 2000 Conference on
Conference_Location :
Nice
Print_ISBN :
0-7803-6319-1
DOI :
10.1109/CLEOE.2000.910057