Sub-micron period grating structures in Ta/sub 2/O/sub 5/ and InO/sub x/ thin oxide films, fabricated using 248 nm interferometric excimer laser ablation

Author

Pissadakis, S. ; Reekie, L. ; Wilkinson, J.S. ; Kiriakidis, G.

Author_Institution

Optoelectron. Res. Centre, Southampton Univ., UK

fYear

2000

fDate

10-15 Sept. 2000

Abstract

Summary form only given. Thin oxide films have proven to be useful materials for the realisation of versatile and functional optoelectronic devices, since they can be fabricated using well-characterised and cost-effective methods and they often offer a unique combination of good optical and electrical properties. Thin oxide films are used in optical communications, imaging and waveguide sensing. The micro-patterning of thin oxide films may play a key-role in the application of this kind of films to useful optoelectronic devices. High resolution features are required, if thin oxide films are used as waveguide overlayered Bragg gratings, or photonic band-gaps located in the 15 /spl mu/m or visible band.

Keywords

Bragg gratings; diffraction gratings; laser ablation; laser beam machining; light interferometry; micromachining; optical fabrication; optical films; tantalum compounds; 15 mum; InO; InO/sub x/; Ta/sub 2/O/sub 5/; high resolution features; interferometric excimer laser ablation; micro-patterning; optical communications; optical fabrication; optoelectronic devices; photonic band-gaps; sub-micron period grating structures; thin oxide films; visible band; waveguide overlayered Bragg gratings; waveguide sensing; Gratings; High-resolution imaging; Optical devices; Optical fiber communication; Optical films; Optical imaging; Optical materials; Optical sensors; Optical waveguides; Optoelectronic devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Europe, 2000. Conference Digest. 2000 Conference on

Conference_Location

Nice

Print_ISBN

0-7803-6319-1

Type

conf

DOI

10.1109/CLEOE.2000.910067

Filename

910067