Title :
MEMS Solutions in RF applications
Author :
Joshi, Vinayak ; Parkhurst, R. ; Morrell, Larry ; Tornatta, Paul
Author_Institution :
Cavendish Kinetics, San Jose, CA, USA
Abstract :
MEMS devices are ideal tuning element since in a non-50 Ohm system, equivalent series resistance (ESR) is the primary source of losses in a tuning system. MEMS have less than 20% of the ESR of solid state devices and are on par with the best fixed-value passive components. Figure 2 shows the usable Q of Cavendish RF MEMS device for the frequency range and associated capacitance state.
Keywords :
Q-factor; micromechanical devices; passive networks; Cavendish RF MEMS device; ESR; Q usability; capacitance state; equivalent series resistance; fixed-value passive components; frequency range; solid state devices; tuning system; Antennas; Capacitance; Capacitors; Micromechanical devices; Performance evaluation; Radio frequency; Tuning;
Conference_Titel :
SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S), 2013 IEEE
Conference_Location :
Monterey, CA
DOI :
10.1109/S3S.2013.6716536
