Title :
Platinum surface additive based nanostructured CuO films for ethanol sensing
Author :
Parmar, Manoj ; Rajanna, K.
Author_Institution :
Dept. of Instrum. & Appl. Phys., Indian Inst. of Sci., Bangalore, India
Abstract :
In the present work, Platinum (Pt)/Copper (II) oxide (CuO) thin film based ethanol sensors were fabricated by sputtering of Pt in varying concentrations over pre-sputtered nanostructured CuO films. The responses of these sensors as a function of Pt concentrations were studied using operating temperature modulation (200-450 °C) and ethanol concentration modulation (100-2500 ppm). During these modulations, it was found that the sensing response was maximum at operating temperature near 400 °C for all the samples irrespective of the Pt concentration dispersed over them. Moreover, the sensing behavior improves for lower Pt concentration (Pt/CuO-60s) and deteriorates for higher Pt concentration (Pt/CuO-120s). In comparison with bare CuO sample, the sensitivity of Pt/CuO-60s increased up to 22% in the linear range and 33% for maximum ethanol concentration. Hence, the well dispersed optimum Pt additive concentration improves the overall sensing behavior including sensitivity, linear working range and response as well as recovery time.
Keywords :
copper compounds; gas sensors; nanosensors; platinum; sputtered coatings; Pt-CuO; ethanol concentration modulation; ethanol sensing; nanostructured films; sputter deposition; surface additive; temperature 200 C to 450 C; temperature modulation; Additives; Ethanol; Films; Modulation; Resistance; Temperature sensors;
Conference_Titel :
Sensors, 2012 IEEE
Conference_Location :
Taipei
Print_ISBN :
978-1-4577-1766-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2012.6411488