ITO film preparation by infrared free electron laser assistance

Author

Yasumoto, Masayoshi ; Ishizu, A. ; Awazu, Koichi ; Tomimasu, T. ; Umesaki, N.

Author_Institution

AIST, Osaka Nat. Res. Inst., Japan

fYear

2000

fDate

10-15 Sept. 2000

Abstract

Summary form only. Transparent conductive thin film (indium tin oxide, ITO) is mainly used for information display elements such as liquid crystal display and touch panels. We propose a film forming method which gives the energy only to deposited film by using an infrared laser, while the substrate is maintained at low temperature. The laser wavelength is in proportion to excitation energy corresponding to a stretching vibrational mode of the irradiated molecular bond. An ordinary IR free electron laser (IR-FEL) is used as this laser The IR-FEL has a continuously tunable wavelength.

Keywords

free electron lasers; indium compounds; laser deposition; laser tuning; liquid crystal displays; optical films; touch sensitive screens; transparency; vibrational states; ITO; ITO film preparation; InSnO; continuously tunable wavelength; deposited film; film forming method; information display elements; infrared free electron laser; irradiated molecular bond; laser deposition; laser wavelength; liquid crystal display; ordinary IR free electron laser; stretching vibrational mode; touch panels; transparent conductive thin film; Bonding; Conductive films; Free electron lasers; Indium tin oxide; Laser excitation; Laser modes; Liquid crystal displays; Substrates; Temperature; Tunable circuits and devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Europe, 2000. Conference Digest. 2000 Conference on

Conference_Location

Nice

Print_ISBN

0-7803-6319-1

Type

conf

DOI

10.1109/CLEOE.2000.910078

Filename

910078