Title :
NEM switch technologies for low-power logic applications
Author :
Grogg, Daniel ; Yu Pu ; Knoll, Aaron ; Duerig, Urs ; Drechsler, U. ; Hagleitner, Christoph ; Despont, Michel
Author_Institution :
Zurich Lab., IBM Res., Ruschlikon, Switzerland
Abstract :
The abrupt switching characteristic of nano-electromechanical (NEM) switch devices is an attractive characteristic to design energy-efficient circuits. In this paper we report the optimization of an in-plane curved cantilever switch geometry for high robustness and low switching energy. The scaling potential has been evaluated, showing that sub-100 aj switching energy is possible. The curved cantilever design has been validated experimentally with good electrical characteristics and high mechanical robustness.
Keywords :
logic circuits; low-power electronics; nanosensors; NEM switch technologies; abrupt switching characteristic; electrical characteristics; high mechanical robustness; high robustness; in-plane curved cantilever switch geometry; low switching energy; low-power logic applications; nanoelectromechanical switch devices; scaling potential; Capacitance; Contacts; Electrodes; Logic gates; Robustness; Switches; Switching circuits;
Conference_Titel :
Sensors, 2012 IEEE
Conference_Location :
Taipei
Print_ISBN :
978-1-4577-1766-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2012.6411561
