DocumentCode
2953368
Title
NEM switch technologies for low-power logic applications
Author
Grogg, Daniel ; Yu Pu ; Knoll, Aaron ; Duerig, Urs ; Drechsler, U. ; Hagleitner, Christoph ; Despont, Michel
Author_Institution
Zurich Lab., IBM Res., Ruschlikon, Switzerland
fYear
2012
fDate
28-31 Oct. 2012
Firstpage
1
Lastpage
3
Abstract
The abrupt switching characteristic of nano-electromechanical (NEM) switch devices is an attractive characteristic to design energy-efficient circuits. In this paper we report the optimization of an in-plane curved cantilever switch geometry for high robustness and low switching energy. The scaling potential has been evaluated, showing that sub-100 aj switching energy is possible. The curved cantilever design has been validated experimentally with good electrical characteristics and high mechanical robustness.
Keywords
logic circuits; low-power electronics; nanosensors; NEM switch technologies; abrupt switching characteristic; electrical characteristics; high mechanical robustness; high robustness; in-plane curved cantilever switch geometry; low switching energy; low-power logic applications; nanoelectromechanical switch devices; scaling potential; Capacitance; Contacts; Electrodes; Logic gates; Robustness; Switches; Switching circuits;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2012 IEEE
Conference_Location
Taipei
ISSN
1930-0395
Print_ISBN
978-1-4577-1766-6
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2012.6411561
Filename
6411561
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