Author_Institution :
Center for Wireless Integrated Micro Sensing & Syst. (WIMS), Univ. of Michigan, Ann Arbor, MI, USA
Abstract :
Nature and biology utilize a myriad of structures, materials, and schemes to achieve superb sensing performance with extreme reliability and robustness. One structure used more commonly in nature is the “hair”. Hair-like sensors are used for acoustic, chemical, flow, pressure, and gas sensing, among others. Hair-like actuators and passive structures are also used for thermal management, filtering, fluid flow control, etc. This paper discusses opportunities and approaches for developing hair-like biomimetic structures for sensing. It discusses fabrication technologies for formation of 3-dimensional structures and creation of transduction functions on these hair structures, and proposes how electronics can be utilized to further improve the functionality of these sensors. A micro hair sensor for measuring air flow speed and direction based on hydraulic amplification is presented as an example of a biomimetic hair sensor.
Keywords :
biomimetics; biosensors; microsensors; reliability; acoustic sensing; air flow direction measurment; air flow speed measurement; biomimetic hair sensors; chemical sensing; fabrication technologies; flow sensing; fluid flow control; gas sensing; hair-like actuators; hair-like biomimetic structures; hydraulic amplification; microhair sensor; passive structures; pressure sensing; reliability; thermal management; three-dimensional structures; transduction functions; Arrays; Biosensors; Hair; Mechanical sensors; Sensitivity; Substrates;