A low-power high-performance accelerometer ASIC for high-end medical motion sensing

Author

Bernal, Olivier D. ; Choe, Kunil ; Gopalakrishnan, Pradeep K. ; Cheng, Hsiu-Yu ; Krishna, Kotlanka R. ; Nuttman, David ; Axelrod, Noel ; Je, Minkyu

Author_Institution

Integrated Circuits & Syst. Lab., A*STAR (Agency of Sci., Technol. & Res.), Singapore, Singapore

fYear

2010

fDate

Aug. 31 2010-Sept. 4 2010

Firstpage

190

Lastpage

193

Abstract

A 170μW readout IC for a capacitive MEMS acceleration sensor was implemented in a 1.5V 0.13μm CMOS for high-end medical motion sensing applications. The accelerometer achieves a 45μg/vHz noise floor and a dynamic range larger than 87dB for a 400Hz bandwidth. Power reduction is achieved by introducing reset and common-mode feedback circuit techniques based on a non-unity-gain feedback configuration.

Keywords

CMOS integrated circuits; accelerometers; application specific integrated circuits; bioMEMS; biomechanics; capacitive sensors; circuit feedback; circuit noise; microsensors; readout electronics; accelerometer; bandwidth 400 Hz; capacitive MEMS acceleration sensor; common mode feedback circuit techniques; high-end medical motion sensing; low-power high-performance accelerometer ASIC; nonunity gain feedback configuration; power reduction; readout IC; reset; size 0.13 mum; voltage 1.5 V; Acceleration; Accelerometers; Application specific integrated circuits; Micromechanical devices; Noise; Robot sensing systems; Acceleration; Electronics, Medical; Feedback; Humans; Micro-Electrical-Mechanical Systems; Monitoring, Physiologic; Movement; Signal Processing, Computer-Assisted;

fLanguage

English

Publisher

ieee

Conference_Titel

Engineering in Medicine and Biology Society (EMBC), 2010 Annual International Conference of the IEEE

Conference_Location

Buenos Aires

ISSN

1557-170X

Print_ISBN

978-1-4244-4123-5

Type

conf

DOI

10.1109/IEMBS.2010.5627928

Filename

5627928