• DocumentCode
    2956602
  • Title

    One and two-dimensional MMI device with strong confinement structure on SOI

  • Author

    Yanzhe Tang ; Yiling Sun ; Wenhui Wang ; Yaming Wu ; Jianyi Yang ; Xiaoqing Jiang

  • Author_Institution
    Dept. of Inf. Sci. & Electron. Eng., Zhejiang Univ., Hangzhou, China
  • fYear
    2004
  • fDate
    29 Sept.-1 Oct. 2004
  • Firstpage
    151
  • Lastpage
    153
  • Abstract
    One and two-dimensional MMI couplers with strong confinement on SOI were fabricated. Analysis shows that it has lower imbalance, wider bandwidth and better fabrication tolerance. A special process was proposed to eliminate the alignment error.
  • Keywords
    optical couplers; optical fabrication; silicon-on-insulator; SOI; one-dimensional MMI device; two-dimensional MMI device; Bandwidth; Couplers; Etching; Interference; Lithography; Optical device fabrication; Refractive index; Silicon compounds; Silicon on insulator technology; Sun;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics, 2004. First IEEE International Conference on
  • Print_ISBN
    0-7803-8474-1
  • Type

    conf

  • DOI
    10.1109/GROUP4.2004.1416712
  • Filename
    1416712
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2956602