Title :
Critical aspects of scanning X-ray/optical interferometry
Author :
Bergamin, A. ; Cavagnero, G. ; Mana, G. ; Zosi, G.
Author_Institution :
Ist. di Metrol., CNR, Torino, Italy
Abstract :
We are presently developing and testing an X-ray and optical interferometer capable of millimeter scans. Our goal is to reduce the relative uncertainty in the measurement of the (220) lattice spacing of a silicon crystal to a few parts in 10/sup 9/. In a new series of measurements, the value obtained with our previous experimental set-up is confirmed and the bounds to the measurement uncertainty are investigated.
Keywords :
X-ray apparatus; X-ray crystallography; electromagnetic wave interferometers; electromagnetic wave interferometry; lattice constants; light interferometers; light interferometry; measurement errors; measurement uncertainty; silicon; (220) lattice spacing measurement; Abbe errors; Avogadro constant; FEA; Si; X-ray interferometer; active control; error budget analysis; laser interferometry; millimeter scans; optical interferometer; quantized positioning; relative uncertainty; scanning X-ray/optical interferometry; silicon crystal; uncertainty bounds; Laser beams; Lattices; Measurement uncertainty; Millimeter wave devices; Optical interferometry; Optical refraction; Pressure measurement; Silicon; Testing; Wavelength measurement;
Conference_Titel :
Precision Electromagnetic Measurements Digest, 1998 Conference on
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-5018-9
DOI :
10.1109/CPEM.1998.699962
