Femtosecond UV-laser processing of sub-/spl mu/m holes in steel foils

Author

Bekesi, J. ; Simon, P. ; Ihlemann, J.

fYear

2000

fDate

10-15 Sept. 2000

Abstract

Summary form only given. The advantages of femtosecond laser pulses for the precision drilling of holes in metals has been often demonstrated. Precise edges without ablation debris can be reached. In most cases Ti:sapphire lasers are used to produce holes with a diameter of some ten /spl mu/m down to some /spl mu/m. A UV-wavelength offers the possibility to improve the optical resolution by a factor of three compared to the Ti:sapphire wavelength and to achieve even sub-/spl mu/m holes with high aspect ratios. We used a fs-UV-laser system (248 nm, 500 fs, 10 mJ) to illuminate a pinhole of 12.5 /spl mu/m diameter. The diffracted light is focused by a Schwarzschild type reflective objective (36x, NA= 0.3) onto the sample surface.

Keywords

foils; laser beam machining; laser materials processing; optical pulse generation; steel; 10 mJ; 12.5 mum; 248 nm; 5 mum; 500 fs; 800 nm; Al/sub 2/O/sub 3/:Ti; Schwarzschild type reflective objective; Ti:sapphire lasers; Ti:sapphire wavelength; UV-wavelength; ablation debris; diffracted light; femtosecond UV-laser processing; femtosecond laser pulses; femtosecond-UV-laser system; focused light; high aspect ratios; holes; metals; optical resolution; pinhole; precision drilling; sample surface; steel foils; sub-micron holes; Artificial intelligence; Electron microscopy; Laser ablation; Laser theory; Optical microscopy; Optical pulses; Optical surface waves; Process control; Steel; Ultrafast optics;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Europe, 2000. Conference Digest. 2000 Conference on

Conference_Location

Nice

Print_ISBN

0-7803-6319-1

Type

conf

DOI

10.1109/CLEOE.2000.910411

Filename

910411