A critical evaluation of RGA testing [military hybrid microcircuits]

Author

David, R.F.S. ; Shores, A.A. ; Friedlander, M.

Author_Institution

Teledyne Microelectron., Los Angeles, CA, USA

fYear

1989

fDate

22-24 May 1989

Firstpage

309

Lastpage

319

Abstract

A study involving silanized glass ampoules containing 12 accurately known gas mixtures that were carefully prepared by a laboratory is discussed. Ampoules were sent as blind samples to four laboratories for residual gas analysis (RGA) using mass spectrometry. The preparation of the samples and the analysis procedure are described in detail. The results obtained by each of the laboratories are discussed. They showed gross inaccuracies and inconsistencies, particularly for water vapor. The deletion of this test from MIL-STD-883 for military hybrid microcircuits is recommended

Keywords

hybrid integrated circuits; integrated circuit testing; mass spectroscopic chemical analysis; military equipment; quality control; standards; MIL-STD-883; RGA testing; analysis procedure; blind sample ampoules; gas mixtures; gross inaccuracies; inconsistencies; mass spectrometry; military hybrid microcircuits; quality conformance evaluation; residual gas analysis; sample preparation; silanized glass ampoules; Argon; Chemical elements; Gases; Glass; Helium; Hybrid integrated circuits; Laboratories; Manufacturing processes; Mass spectroscopy; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Components Conference, 1989. Proceedings., 39th

Conference_Location

Houston, TX

Type

conf

DOI

10.1109/ECC.1989.77765

Filename

77765