Title :
A critical evaluation of RGA testing [military hybrid microcircuits]
Author :
David, R.F.S. ; Shores, A.A. ; Friedlander, M.
Author_Institution :
Teledyne Microelectron., Los Angeles, CA, USA
Abstract :
A study involving silanized glass ampoules containing 12 accurately known gas mixtures that were carefully prepared by a laboratory is discussed. Ampoules were sent as blind samples to four laboratories for residual gas analysis (RGA) using mass spectrometry. The preparation of the samples and the analysis procedure are described in detail. The results obtained by each of the laboratories are discussed. They showed gross inaccuracies and inconsistencies, particularly for water vapor. The deletion of this test from MIL-STD-883 for military hybrid microcircuits is recommended
Keywords :
hybrid integrated circuits; integrated circuit testing; mass spectroscopic chemical analysis; military equipment; quality control; standards; MIL-STD-883; RGA testing; analysis procedure; blind sample ampoules; gas mixtures; gross inaccuracies; inconsistencies; mass spectrometry; military hybrid microcircuits; quality conformance evaluation; residual gas analysis; sample preparation; silanized glass ampoules; Argon; Chemical elements; Gases; Glass; Helium; Hybrid integrated circuits; Laboratories; Manufacturing processes; Mass spectroscopy; Testing;
Conference_Titel :
Electronic Components Conference, 1989. Proceedings., 39th
Conference_Location :
Houston, TX
DOI :
10.1109/ECC.1989.77765
