DocumentCode
2958460
Title
A new variational method to determine effective channel length and series resistance of MOSFET´s
Author
Yamaguchi, K. ; Amishiro, H. ; Yamawaki, M. ; Asai, S.
Author_Institution
Mitsubishi Electr. Corp., Hyogo, Japan
fYear
1998
fDate
23-26 Mar 1998
Firstpage
123
Lastpage
126
Abstract
A new variational method to determine the effective channel length and the series resistance of MOSFETs is proposed. It is analytically shown that there is nothing well defined, except for effective channel length at Vgt=0 in the resistance-based method. The new method yields constant effective channel length in the neighborhood of V gs=Vth and series resistance dependent on the gate voltage. The new method is well defined and gives accurate and consistent effective channel length and series resistance
Keywords
MOSFET; electric resistance; semiconductor device models; variational techniques; MOSFET; constant effective channel length; effective channel length; gate voltage; resistance-based method; series resistance; variational method; Circuit synthesis; Electric resistance; Electrical resistance measurement; Laboratories; MOSFET circuits; Monitoring; Threshold voltage; Ultra large scale integration; Uncertainty;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 1998. ICMTS 1998., Proceedings of the 1998 International Conference on
Conference_Location
Kanazawa
Print_ISBN
0-7803-4348-4
Type
conf
DOI
10.1109/ICMTS.1998.688054
Filename
688054
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