Title :
A new variational method to determine effective channel length and series resistance of MOSFET´s
Author :
Yamaguchi, K. ; Amishiro, H. ; Yamawaki, M. ; Asai, S.
Author_Institution :
Mitsubishi Electr. Corp., Hyogo, Japan
Abstract :
A new variational method to determine the effective channel length and the series resistance of MOSFETs is proposed. It is analytically shown that there is nothing well defined, except for effective channel length at Vgt=0 in the resistance-based method. The new method yields constant effective channel length in the neighborhood of V gs=Vth and series resistance dependent on the gate voltage. The new method is well defined and gives accurate and consistent effective channel length and series resistance
Keywords :
MOSFET; electric resistance; semiconductor device models; variational techniques; MOSFET; constant effective channel length; effective channel length; gate voltage; resistance-based method; series resistance; variational method; Circuit synthesis; Electric resistance; Electrical resistance measurement; Laboratories; MOSFET circuits; Monitoring; Threshold voltage; Ultra large scale integration; Uncertainty;
Conference_Titel :
Microelectronic Test Structures, 1998. ICMTS 1998., Proceedings of the 1998 International Conference on
Conference_Location :
Kanazawa
Print_ISBN :
0-7803-4348-4
DOI :
10.1109/ICMTS.1998.688054
