DocumentCode :
2958519
Title :
Wavelength-tuned phase-shifting calibration based on the fourier transform in time domain
Author :
Ren-hui, Guo ; Jian-xin, Li ; Ri-hong, Zhu ; Lei, Chen
Author_Institution :
Inst. of Electron. Eng. & Photoelectronic Technol., Nanjing Univ. of Sci. & Technol., Nanjing, China
fYear :
2009
fDate :
22-24 July 2009
Firstpage :
371
Lastpage :
375
Abstract :
The phase-shifting interferometer using a wavelength tunable laser is applied to test large optical components. A method based on the one-dimensional Fourier transform in time domain to calibrate the phase in wavelength-tuned phase-shifting interferometer is presented. It solves the problem that how to control the phase-shifting step to a certain value at different interferometric cavity lengths when testing. The calibration software is written and the wavelength-tuned phase-shifting interferometer using a tunable laser with the central wavelength 632.8 nm is established. In the experiments, the results are compared with the results obtained by the ZYGO interferometer. It shows that when the cavity length is less than 2 m, the testing precision is lambda/50.
Keywords :
Fourier transform optics; calibration; laser cavity resonators; laser tuning; measurement by laser beam; optical testing; phase shifting interferometry; time-domain analysis; ZYGO interferometer; interferometric cavity length; one-dimensional Fourier transform; optical component testing; phase-shifting interferometer; time domain; wavelength tunable laser; wavelength-tuned phase-shifting calibration; Calibration; Fourier transforms; Laser theory; Laser tuning; Optical devices; Optical interferometry; Phase shifting interferometry; Space technology; Testing; Tunable circuits and devices;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Service Operations, Logistics and Informatics, 2009. SOLI '09. IEEE/INFORMS International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
978-1-4244-3540-1
Electronic_ISBN :
978-1-4244-3541-8
Type :
conf
DOI :
10.1109/SOLI.2009.5203961
Filename :
5203961
Link To Document :
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