Title :
Synthesis Method for BAW Filters Computation
Author :
Fan, J. ; Chatras, M. ; Cros, D.
Author_Institution :
XLIM, Limoges
Abstract :
We present a method for BAW (bulk acoustic wave) filters computation. This method compares the equivalent impedance of the BUTTERWORTH-VAN DYKE (BVD) model based on an electrical equivalent circuit with the impedance obtained by piezoelectric equations in one dimension for a piezoelectric structure. Using the least squares method, the three elements of the BVD model can be determined as a function of the dimensions and the properties of the piezoelectric resonator. Based on the proposed method, a ladder piezoelectric 7 pole filter can be easily optimized using an electrical synthesis. The frequency of the proposed filter is around 1.84GHz and the band pass close to 100MHz. This method can be used either for FBAR (film bulk acoustic resonator) or SMR (solidly mounted resonator) structure.
Keywords :
band-pass filters; bulk acoustic wave devices; equivalent circuits; ladder filters; least squares approximations; resonator filters; BAW filters computation; BUTTERWORTH-VAN DYKE model; FBAR; band pass filters; bandwidth 100 MHz; bulk acoustic wave filters computation; electrical equivalent circuit; electrical synthesis; film bulk acoustic resonator; frequency 1.84 GHz; ladder piezoelectric 7 pole filter; least squares method; piezoelectric equations; piezoelectric resonator; piezoelectric structure; solidly mounted resonator structure; Acoustic waves; Band pass filters; Circuit synthesis; Equations; Equivalent circuits; Film bulk acoustic resonators; Impedance; Least squares methods; Levee; Resonator filters;
Conference_Titel :
Electronics, Circuits and Systems, 2006. ICECS '06. 13th IEEE International Conference on
Conference_Location :
Nice
Print_ISBN :
1-4244-0395-2
Electronic_ISBN :
1-4244-0395-2
DOI :
10.1109/ICECS.2006.379807
