Modeling and positioning control of a ball screw driven stage

The demand for high precision stages has received great attention due to the progress of nanotechnology. In the ball-screw-driven systems, the friction behavior dominates the resulting performance and is usually known as the stick-slip phenomenon. In this paper, friction models are introduced to describe the dynamic behavior of a conventional ball-screw-driven x-y stage. Two sets of controllers corresponding to the static and the dynamic friction models are proposed based on the integral type sliding mode control law. Experimental results demonstrate that the system achieves high-precision (10 nm) and long-range (10 cm) positioning task.