Modeling and positioning control of a ball screw driven stage

Author

Jang, M.J. ; Lin, K.C. ; Chen, C.L.

Author_Institution

Dept. of Autom. & Control Eng., Far East Coll., Tainan, Taiwan

Volume

2

fYear

2004

fDate

2004

Firstpage

943

Abstract

The demand for high precision stages has received great attention due to the progress of nanotechnology. In the ball-screw-driven systems, the friction behavior dominates the resulting performance and is usually known as the stick-slip phenomenon. In this paper, friction models are introduced to describe the dynamic behavior of a conventional ball-screw-driven x-y stage. Two sets of controllers corresponding to the static and the dynamic friction models are proposed based on the integral type sliding mode control law. Experimental results demonstrate that the system achieves high-precision (10 nm) and long-range (10 cm) positioning task.

Keywords

control system synthesis; friction; nanopositioning; servomechanisms; variable structure systems; ball screw driven stage; ball-screw-driven systems; dynamic friction models; friction behavior; integral sliding mode control law; nanopositioning; positioning control; static friction models; stick-slip phenomenon; x-y stage; Aerodynamics; Automatic control; Fasteners; Friction; Hysteresis; Nonlinear equations; Plastics; Servomechanisms; Sliding mode control; Springs;

fLanguage

English

Publisher

ieee

Conference_Titel

Networking, Sensing and Control, 2004 IEEE International Conference on

ISSN

1810-7869

Print_ISBN

0-7803-8193-9

Type

conf

DOI

10.1109/ICNSC.2004.1297074

Filename

1297074