Title :
Deep level observation in InP by temperature dependence of the van der Pauw´s symmetry factor
Author_Institution :
Res. Inst. for Tech. Phys., Hungarian Acad. of Sci., Budapest, Hungary
Abstract :
Summary form only given. One of the most convenient methods of the basic characterisation of semiconductors is Hall effect measurement by van der Pauw´s geometry. As a “by-product” the symmetry factor and a function of the symmetry factor is calculated. In this work we wish to demonstrate that this factor can indicate quite important properties of the sample. Though these properties are connected with inhomogeneities, deep levels can be observed by the temperature dependence of the symmetry factor. Both bulk InP and InP layers on semi-insulating substrates have been studied
Keywords :
Hall effect; III-V semiconductors; deep levels; indium compounds; symmetry; Hall effect; InP; deep levels; inhomogeneities; semiconductor; symmetry factor; temperature dependence; van der Pauw measurement; Density estimation robust algorithm; Geometry; Hall effect; Indium phosphide; Physics; Semiconductor process modeling; Substrates; Temperature dependence; Temperature distribution; Temperature measurement;
Conference_Titel :
Indium Phosphide and Related Materials, 1996. IPRM '96., Eighth International Conference on
Conference_Location :
Schwabisch-Gmund
Print_ISBN :
0-7803-3283-0
DOI :
10.1109/ICIPRM.1996.492393