DocumentCode
2965167
Title
MEMS relative pressure sensor on flexible substrate
Author
Ahmed, Moinuddin ; Butler, Donald P. ; Butler, Zeynep-Celik
Author_Institution
Dept. of Electr. Eng., Univ. of Texas at Arlington, Arlington, TX, USA
fYear
2011
fDate
28-31 Oct. 2011
Firstpage
460
Lastpage
463
Abstract
The fabrication and characterization of micromachined, piezoresistive, relative pressure sensors sandwiched between flexible polyimide layers is described. This work is motivated by the need to monitor force and pressure on nonplanar surfaces for structural health monitoring. 35-nm-thick nichrome (Ni-80%/Cr-20%) is used as a sensing material for the pressure sensor. The average value of the gauge factor of the nichrome was found to be 1.75.
Keywords
microfabrication; microsensors; pressure sensors; MEMS relative pressure sensor; flexible polyimide layers; flexible substrate; micromachined; piezoresistive; Electrical resistance measurement; Piezoresistive devices; Polyimides; Pressure measurement; Resistance; Substrates; Voltage measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2011 IEEE
Conference_Location
Limerick
ISSN
1930-0395
Print_ISBN
978-1-4244-9290-9
Type
conf
DOI
10.1109/ICSENS.2011.6126932
Filename
6126932
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