Matching of maximum gauge factor and TCR zero crossing of Me-DLC

Author

Heckmann, Ulrike ; Bandorf, Ralf ; Petersen, Mirjana ; Gwozdz, Virginia ; Bräuer, Günter

Author_Institution

Sensoric Functional Coatings, Fraunhofer Inst. for Surface Eng. & Thin Films, Braunschweig, Germany

fYear

2011

fDate

28-31 Oct. 2011

Firstpage

472

Lastpage

475

Abstract

Metal containing diamond-like carbon (Me-DLC) is a promising material for temperature compensated thin film strain gauges with high strain sensitivity. The discussed material offers gauge factors above 10 at zero crossing of the temperature coefficient of resistance. With Ni-DLC the best results so far were obtained. Based on the results from static deposition an industrially suited process under dynamic conditions was investigated. In both cases gauge factors of approximately 10 could be realized. But there is still room for further improvement. Additionally, Fe-DLC seems to be an interesting alternative. First investigations show gauge factors up to approximately 8 with reasonable temperature compensation.

Keywords

diamond-like carbon; sensitivity; strain gauges; strain sensors; TCR zero crossing; high strain sensitivity; maximum gauge factor; temperature coefficient of resistance; thin film strain gauges; Films; Metals; Resistance; Strain; Substrates; Temperature; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2011 IEEE

Conference_Location

Limerick

ISSN

1930-0395

Print_ISBN

978-1-4244-9290-9

Type

conf

DOI

10.1109/ICSENS.2011.6126973

Filename

6126973