DocumentCode :
2966037
Title :
Multiple-wavelength VCSEL array by grading a spacer layer for WDM applications
Author :
Dayal, P. Babu ; Nakajima, J. ; Sakaguchi, T. ; Matsutani, A. ; Koyama, F.
Author_Institution :
Microsyst. Res. Center, Tokyo Inst. of Technol., Yokohama
fYear :
2008
fDate :
2-15 Aug. 2008
Firstpage :
211
Lastpage :
212
Abstract :
In this paper we present a 0.98 mum 4-channel VCSEL array fabricated with grading a SiO2 spacer layer. A maximum of 5.4 nm wavelength span has achieved using 8.5 pairs of SiO2/Ta2O5 mirror. Also, surface nanomachining process is presented for making on-wafer precise spacer-layer gradients.
Keywords :
laser mirrors; machining; semiconductor laser arrays; silicon compounds; surface emitting lasers; tantalum compounds; wavelength division multiplexing; 4-channel VCSEL array; SiO2-Ta2O5; mirror; multiple-wavelength VCSEL array; on-wafer precise spacer-layer gradients; surface nanomachining; wavelength 5.4 nm; wavelength division multiplexing; Dielectrics; Gratings; Mirrors; Optical arrays; Optical surface waves; Quantum dots; Reflectivity; Threshold current; Vertical cavity surface emitting lasers; Wavelength division multiplexing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nano-Optoelectronics Workshop, 2008. i-NOW 2008. International
Conference_Location :
Shonan Village
Print_ISBN :
978-1-4244-2656-0
Type :
conf
DOI :
10.1109/INOW.2008.4634513
Filename :
4634513
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2966037
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