• DocumentCode
    2966037
  • Title

    Multiple-wavelength VCSEL array by grading a spacer layer for WDM applications

  • Author

    Dayal, P. Babu ; Nakajima, J. ; Sakaguchi, T. ; Matsutani, A. ; Koyama, F.

  • Author_Institution
    Microsyst. Res. Center, Tokyo Inst. of Technol., Yokohama
  • fYear
    2008
  • fDate
    2-15 Aug. 2008
  • Firstpage
    211
  • Lastpage
    212
  • Abstract
    In this paper we present a 0.98 mum 4-channel VCSEL array fabricated with grading a SiO2 spacer layer. A maximum of 5.4 nm wavelength span has achieved using 8.5 pairs of SiO2/Ta2O5 mirror. Also, surface nanomachining process is presented for making on-wafer precise spacer-layer gradients.
  • Keywords
    laser mirrors; machining; semiconductor laser arrays; silicon compounds; surface emitting lasers; tantalum compounds; wavelength division multiplexing; 4-channel VCSEL array; SiO2-Ta2O5; mirror; multiple-wavelength VCSEL array; on-wafer precise spacer-layer gradients; surface nanomachining; wavelength 5.4 nm; wavelength division multiplexing; Dielectrics; Gratings; Mirrors; Optical arrays; Optical surface waves; Quantum dots; Reflectivity; Threshold current; Vertical cavity surface emitting lasers; Wavelength division multiplexing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano-Optoelectronics Workshop, 2008. i-NOW 2008. International
  • Conference_Location
    Shonan Village
  • Print_ISBN
    978-1-4244-2656-0
  • Type

    conf

  • DOI
    10.1109/INOW.2008.4634513
  • Filename
    4634513
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2966037