Title :
Multichip packaging technology with laser-patterned interconnects
Author :
Barfknecht, Andrew T. ; Tuckerman, David B. ; Kaschmitter, James L. ; McWilliams, Bruce M.
Author_Institution :
Lawrence Livermore Nat. Lab., CA, USA
Abstract :
A multichip silicon-on-silicon packaging technology that incorporates laser-patterned thin-film interconnects is described. This technology is particularly suited for application in high-speed, high-power, high-I/O systems where it provides many advantages over more traditional methods. The laser-patterned thin-film interconnects allow higher I/O densities and better electrical performance than wire bonds or tape automated bonding (TAB). The face-up, thin-film eutectic die-attach technique used provides much lower thermal resistance between the substrate and the chips than solder bump die attach can achieve. In addition, laser-patterned interconnects demonstrate superior ruggedness and fatigue resistance under thermomechanical cycling and shock. This technology has been used to produce a 10-chip memory module, samples of which have been tested using relevant methods of MIL-STD 883C
Keywords :
hybrid integrated circuits; integrated circuit technology; packaging; thin film circuits; 10-chip memory module; MIL-STD 883C; Si; Si-on-Si packaging technology; eutectic die-attach technique; face up technique; fatigue resistance; high-I/O systems; high-power; high-speed; laser-patterned interconnects; multichip packaging technology; ruggedness; shock; thermal resistance; thermomechanical cycling; thin-film interconnects; Bonding; Electric resistance; Fatigue; Microassembly; Packaging; Semiconductor thin films; Substrates; Thermal resistance; Transistors; Wire;
Conference_Titel :
Electronic Components Conference, 1989. Proceedings., 39th
Conference_Location :
Houston, TX
DOI :
10.1109/ECC.1989.77822