Biocompatible polymeric wireless pressure sensor for intraocular pressure sensing application

Author

Xue, Ning ; Lee, Jeong-Bong ; Foland, Steven ; Chang, Sung Pil

Author_Institution

Dept. of Electr. Eng., Univ. of Texas at Dallas, Richardson, TX, USA

fYear

2011

fDate

28-31 Oct. 2011

Firstpage

1748

Lastpage

1751

Abstract

Telemetric sensing is a promising method to accomplish non-contact and continuous disease diagnoses. Implantable intraocular pressure (IOP) sensor using wireless telemetric technology is highly desirable. This paper presents a fully integrated SU-8-based passive wireless inductively-coupled pressure sensor, especially designed for IOP sensor. The sensor was microfabricated using biocompatible materials - gold and SU-8 - to form the LC parallel circuit and the pressure sensitive diaphragm. Multi-SU-8-layers were stacked to completely isolate the working circuit from the biological tissue medium. The characterization result of IOP sensor shows that it has relatively high responsivity (683 KHz/mmHg) in the pressure range of 0 - 60 mmHg and has pressure resolution much lower than 1 mmHg in both air and saline medium.

Keywords

biological tissues; biomedical telemetry; biosensors; pressure sensors; wireless sensor networks; IOP sensor; LC parallel circuit; SU-8-based passive wireless inductively-coupled pressure sensor; biocompatible materials; biocompatible polymeric wireless pressure sensor; biological tissue medium; intraocular pressure sensing application; pressure 0 mm Hg to 60 mm Hg; pressure sensitive diaphragm; telemetric sensing; wireless telemetric technology; Capacitance; Coils; Fabrication; Gold; Resonant frequency; Wireless communication; Wireless sensor networks;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2011 IEEE

Conference_Location

Limerick

ISSN

1930-0395

Print_ISBN

978-1-4244-9290-9

Type

conf

DOI

10.1109/ICSENS.2011.6127005

Filename

6127005