Title :
Microcantilever array sensors with integrated PDMS microfluidics
Author :
Nordin, Gregory P. ; Anderson, Ryan R. ; Hu, Weisheng ; Ness, Stanley J. ; Richards, Danny C. ; Oxborrow, Joseph ; Gustafson, Timothy ; Tsai, Ben ; Mazzeo, Brian ; Woolley, Adam
Author_Institution :
Electr. & Comput. Eng. Dept., Brigham Young Univ., Provo, UT, USA
Abstract :
We recently developed a new in-plane photonic transduction method for simultaneous readout of microcantilevers in an array on a single chip. Here we describe scale-up of array size to 64 microcantilevers (MCLs) and integration of polydimethylsiloxane (PDMS) microfluidics with chips including multiple MCL arrays. We illustrate biosensing with biotin/streptavidin as a model system, and demonstrate an integrated on-chip pump with a MCL array.
Keywords :
biosensors; microfluidics; biosensing; in-plane photonic transduction method; integrated PDMS microfluidics; microcantilever array sensors; polydimethylsiloxane microfluidics; Arrays; Microfluidics; Photonics; Pumps; Sensors; Silicon; Temperature measurement;
Conference_Titel :
Sensors, 2011 IEEE
Conference_Location :
Limerick
Print_ISBN :
978-1-4244-9290-9
DOI :
10.1109/ICSENS.2011.6127019
